MEMS

Synthesis of a 2DOF electrothermomechanical actuator using topology optimization.

The design procedure is described in Sigmund (2000a,b) and Sigmund and Buhl (2000), Sigmund (2000c) and
Jonsman, Sigmund and Bouwstra (2000).

  definition of design domain
Figure 1: Design domain.

  optimal topology
Figure 2: Optimized topology (100 by 80 elements).

  definition of design domain
Figure 3: Animation.

  manufacturing
Figure 4: a) Actuator manufactured using laser-micromachining and b) test results.